Downstream in-situ plasma cleaner and plasma source - PIE Scientific LLC
piescientific.com
Downstream in-situ plasma cleaner and plasma source - PIE Scientific LLC
Remote plasma sources and in-situ plasma cleaner for hydrocarbon contamination removal for samples and chamber on SEM, FIB, XPS, TEM system. In-situ cleaning of sample before film deposition and growth on ALD type equipment.
Jun 4, 2021
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